Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array

CORC > 北京大学 > 信息科学技术学院

	Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array
	HUANG JingQing ; ZHAO Meng ; ZHANG TingTing ; CHEN ZhongJian ; HONG LiChen ; WU Feng ; ZHANG YaCong ; LU WenGao ; GAO ChengChen ; HAO YiLong
刊名	Science China(Information Sciences)
	2014
关键词	linearity closed-loop accelerometer capacitive MEMS ROIC
英文摘要	This paper presents mathematical formulae showing that the distance mismatch for an uncentered proof mass in an accelerator sensor does not influence the linearity of the closed-loop accelerometer as a whole.This asymmetry in sensors only introduces an output voltage offset in the readout integrated...; 06; 199-210
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/451032]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	HUANG JingQing,ZHAO Meng,ZHANG TingTing,et al. Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array[J]. Science China(Information Sciences),2014.
APA	HUANG JingQing.,ZHAO Meng.,ZHANG TingTing.,CHEN ZhongJian.,HONG LiChen.,...&HAO YiLong.(2014).Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array.Science China(Information Sciences).
MLA	HUANG JingQing,et al."Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array".Science China(Information Sciences) (2014).