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	DESIGN AND FABRICATION OF A SANDWICH FRAMED FOCAL PLANE ARRAY FOR UNCOOLED INFRARED IMAGING
	Zhao, R. ; Ma, W. ; Wang, S. ; Yu, X. ; Feng, Y. ; Zhao, Y.
	2015
关键词	Focal plane array (FPA) bimaterial cantilever sandwich frame infrared imaging
英文摘要	This paper reports a novel infrared (IR) focal plane array (FPA) by using SiNx/SiO2/SiNx sandwich structure as the frames of bimaterial cantilever pixels, and which have sufficient supporting intensity to avoid the fracture and bending of the focal plane. The device was fabricated with a bulk silicon process, where a trench backfill technique was employed to form the SiNx/SiO2/SiNx sandwiched frames. By replacing the silicon frame with SiNx/SiO2/SiNx frame, the fill factor of the FPA is increased to 42%. Meanwhile, the reliability and uniformity of the FPA were improved with a design of staggered arrangement of cantilever pixels. Thermal images of human bodies were captured successfully with the FPA at room temperature.; CPCI-S(ISTP); yuxm@pku.edu.cn; 1318-1321
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/450295]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhao, R.,Ma, W.,Wang, S.,et al. DESIGN AND FABRICATION OF A SANDWICH FRAMED FOCAL PLANE ARRAY FOR UNCOOLED INFRARED IMAGING. 2015-01-01.

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