Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging   Using Sandwich-Framed Structure

doi:10.1109/JMEMS.2016.2533427

CORC > 北京大学 > 信息科学技术学院

	Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure
	Ma, Wei ; Zhao, Rui ; Wang, Shuyang ; Yu, Xiaomei ; Feng, Yun ; Zhao, Yuejing
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2016
关键词	Focal plane array (FPA) infrared (IR) imaging sandwiched frame trench backfill technique PERFORMANCE DETECTORS DESIGN FABRICATION
DOI	10.1109/JMEMS.2016.2533427
英文摘要	This paper reports a novel infrared focal plane array (FPA) using SiNx/SiO2/SiNx sandwiched structure as the supporting frames for bimaterial cantilever pixels. The device was fabricated by a bulk silicon process, where a trench backfill technique was employed to form the SiNx/SiO2/SiNx sandwiched frames. By replacing the silicon frame with SiNx/SiO2/SiNx sandwiched frame, the fill factor of the FPA is increased to 42%. Compared with other substrate-free FPAs with frames making of a thin layer of SiNx, the sandwiched frame provides more supporting strength for the cantilever pixels. Meanwhile, the reliability and the uniformity of the FPA were improved with a design of staggered arrangement of cantilever pixels. Thermal images of human bodies were captured successfully at room temperature. A complete analysis of device performance was also carried out both theoretically and experimentally, including thermomechanical sensitivity, noise equivalent temperature difference, and response time. [2015-0261]; National Natural Science Foundation of China [61275104, 61575003]; SCI(E); EI; ARTICLE; ma_wei@pku.edu.cn; zhaorui2012@pku.edu.cn; wangsy2011@pku.edu.cn; yuxm@pku.edu.cn; fengy_optics@163.com; yjzhao@bit.edu.cn; 2; 413-420; 25
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/437491]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, Wei,Zhao, Rui,Wang, Shuyang,et al. Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2016.
APA	Ma, Wei,Zhao, Rui,Wang, Shuyang,Yu, Xiaomei,Feng, Yun,&Zhao, Yuejing.(2016).Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS.
MLA	Ma, Wei,et al."Bimaterial Cantilever Focal Plane Array for Uncooled Infrared Imaging Using Sandwich-Framed Structure".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2016).