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	Terahertz addressed spatial light modulator based on bi-material cantilevers array
	Wen, Y. ; Ma, W. ; Yu, X. ; Zhao, Y. ; Liu, M. ; Dong, L.
	2015
英文摘要	This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate. The device works passively in an optical reflection mode with no-electronic components and can easily achieve high resolution. The coaxial visible light was spatially modulated to a Gaussian spot and cross shape with the measured modulation sensitivity of 0.18 deg/μW and the theoretical time constant of 7.8ms. ? 2015 IEEE.; EI; 920-923
语种	英语
出处	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOI标识	10.1109/TRANSDUCERS.2015.7181074
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/436771]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wen, Y.,Ma, W.,Yu, X.,et al. Terahertz addressed spatial light modulator based on bi-material cantilevers array. 2015-01-01.

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