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	3D nano-fence fluidic structures based on sidewall scallops
	Ma, P.C. ; Zhang, K. ; Fan, J.R. ; Wu, W.G.
	2014
英文摘要	This paper reports novel 3D nano-fence based fluidic structures, which are fabricated by utilizing the sidewall scallops appearing in silicon ICP-DRIE process. We realize the controllability of forming the silicon fences with nano-aperture size below 500 nm in trenches of various shapes by varying the nano-mask width. The nano-fence structures could find broad applications as a multifunctional platform in fluid purification or segregation, live microorganism capture or sorting, and single-cell cultivation or recognition, etc. ? 14CBMS.; EI; 120-122
语种	英语
出处	18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/423967]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, P.C.,Zhang, K.,Fan, J.R.,et al. 3D nano-fence fluidic structures based on sidewall scallops. 2014-01-01.

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