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	NEMS VARIABLE OPTICAL ATTENUATOR (VOA) DRIVEN BY OPTICAL FORCE
	Dong, B. ; Cai, H. ; Gu, Y. D. ; Yang, Z. C. ; Jin, Y. F. ; Hao, Y. L. ; Kwong, D. L. ; Liu, A. Q.
	2015
英文摘要	This paper reports a Nanoelectromechanical System (NEMS) Variable Optical Attenuator (VOA) driven by the optical gradient force. The VOA is realized via a waveguide based directional coupler. The gap in the directional coupler is controlled via an optical force driven actuator. The doubly -clamped silicon beam actuator is controlled by tuning the wavelength of control light. The signal light can be attenuated to 20% of original value in the experiment. The NEMS VOAs have the merits of small dimension, low power consumption and good capability for all optical integration, making it a good candidate for future applications in silicon photonics circuit and optical communication devices.; EI; CPCI-S(ISTP); eaqliu@ntu.edu.sg; February; 972-975; 2015-February
语种	英语
出处	2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)
DOI标识	10.1109/MEMSYS.2015.7051123
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/423672]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Dong, B.,Cai, H.,Gu, Y. D.,et al. NEMS VARIABLE OPTICAL ATTENUATOR (VOA) DRIVEN BY OPTICAL FORCE. 2015-01-01.

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