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	BONDING-FRIENDLY PCPDMS: DEPOSITING PARYLENE C INTO PDMS MATRIX AT AN ELEVATED TEMPERATURE
	Liu, Yaoping ; Zhang, Lingqian ; Wang, Wei ; Wu, Wengang
	2015
英文摘要	This paper reported a simple and effective process of bonding-friendly Parylene C-caulked PDMS (pcPDMS) for low-permeability required microfluidics. Parylene C was deposited into PDMS matrix at an elevated temperature (higher than 135 degrees C) to caulk the permeable sites. The so-prepared pcPDMS can be directly bonded with oxygen plasma treatment just as pristine PDMS. SEM EDAX and Laser scanning confocal microscopy (LSCM) were introduced to characterize the Parylene C caulked status in the PDMS matrix based on the specific Cl element component and the firstly-found temperature-sensitive autofluorescence of Parylene C. The preliminary results indicated that the present bonding-friendly pcPDMS can successfully suppress the diffusion of small molecules into the PDMS matrix.; EI; CPCI-S(ISTP); w.wang@pku.edu.cn; February; 467-469; 2015-February
语种	英语
出处	2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)
DOI标识	10.1109/MEMSYS.2015.7050992
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/423602]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Yaoping,Zhang, Lingqian,Wang, Wei,et al. BONDING-FRIENDLY PCPDMS: DEPOSITING PARYLENE C INTO PDMS MATRIX AT AN ELEVATED TEMPERATURE. 2015-01-01.

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