NEMS OPTICAL CROSS CONNECT (OXC) DRIVEN BY OPTICL FORCE | |
Cai, H. ; Lin, J. X. ; Wu, J. H. ; Dong, B. ; Gu, Y. D. ; Yang, Z. C. ; Jin, Y. F. ; Hao, Y. L. ; Kwong, D. L. ; Liu, A. Q. | |
2015 | |
英文摘要 | This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double etch technique. A switching time of 0.24 mu s is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.; EI; CPCI-S(ISTP); caih@ime.a-star.edu.sg; February; 57-60; 2015-February |
语种 | 英语 |
出处 | 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) |
DOI标识 | 10.1109/MEMSYS.2015.7050885 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/423539] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Cai, H.,Lin, J. X.,Wu, J. H.,et al. NEMS OPTICAL CROSS CONNECT (OXC) DRIVEN BY OPTICL FORCE. 2015-01-01. |
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