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Simulation of Positive Bias Temperature Instability (PBTI) in high-k FinFET by KMC method
Li, Yun ; Wang, Yijiao ; Jiang, Hai ; Du, Gang ; Kang, Jinfeng ; Liu, Xiaoyan
2015
英文摘要Positive Bias Temperature Instability (PBTI) of HfO2/metal gate n-channel bulk FinFET is simulated through a KMC method, which includes fully coupled multi-physical models under a unified framework. PBTI is simulated using electron capture/emission and trap generation/recombination. By comparing PBTI of different traps with/without generation and recombination in HfO2, it indicates that the only consideration of trap generation can result in overestimation of the threshold shift and shorten predicted lifetime. ? 2015 IEEE.; EI; 2015-June
语种英语
出处2015 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2015
DOI标识10.1109/VLSI-TSA.2015.7117574
内容类型其他
源URL[http://ir.pku.edu.cn/handle/20.500.11897/423517]  
专题信息科学技术学院
推荐引用方式
GB/T 7714
Li, Yun,Wang, Yijiao,Jiang, Hai,et al. Simulation of Positive Bias Temperature Instability (PBTI) in high-k FinFET by KMC method. 2015-01-01.
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