Simulation of Positive Bias Temperature Instability (PBTI) in high-k FinFET by KMC method | |
Li, Yun ; Wang, Yijiao ; Jiang, Hai ; Du, Gang ; Kang, Jinfeng ; Liu, Xiaoyan | |
2015 | |
英文摘要 | Positive Bias Temperature Instability (PBTI) of HfO2/metal gate n-channel bulk FinFET is simulated through a KMC method, which includes fully coupled multi-physical models under a unified framework. PBTI is simulated using electron capture/emission and trap generation/recombination. By comparing PBTI of different traps with/without generation and recombination in HfO2, it indicates that the only consideration of trap generation can result in overestimation of the threshold shift and shorten predicted lifetime. ? 2015 IEEE.; EI; 2015-June |
语种 | 英语 |
出处 | 2015 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2015 |
DOI标识 | 10.1109/VLSI-TSA.2015.7117574 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/423517] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Li, Yun,Wang, Yijiao,Jiang, Hai,et al. Simulation of Positive Bias Temperature Instability (PBTI) in high-k FinFET by KMC method. 2015-01-01. |
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