Uncooled Focal Plane Array for Multiband IR Imaging Using   Optical-Readout Bimaterial Cantilevers

doi:10.1109/JMEMS.2014.2334359

CORC > 北京大学 > 信息科学技术学院

	Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers
	Ma, Wei ; Wang, Shuyang ; Wen, Yongzheng ; Zhao, Yuejin ; Dong, Liquan ; Yu, Xiaomei
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2015
关键词	Focal plane array (FPA) infrared (IR) imaging multi-band absorption Cr nano- film THIN METAL-FILMS ABSORBERS PERFORMANCE DETECTORS DESIGN
DOI	10.1109/JMEMS.2014.2334359
英文摘要	This paper presents the design, fabrication, and performance of a 256 x 256 multiband infrared (IR) focal plane array (FPA) using microbimaterial cantilever as the sensitive pixel. Different from traditional uncooled IR FPA that works only at long wavelength IR, the working bandwidth of the presented FPA is extended to full band IR, covering the three IR atmospheric windows of 1-2.5 mu m, 3-5 mu m and 8-14 mu m simultaneously. The multiband performance is attributed to the elaborately designed multiband absorber consisting of a stacked layer of silicon nitride, chromium nanofilm, and gold mirror. The absorbing mechanism of the stacked layer is discussed in detail and testified by experimental results. Images of short-wavelength, middle-wavelength, and long-wavelength IR were captured successfully with the single FPA. The measured sensitivity and noise equivalent temperature difference of the FPA are 0.18 mu m/K and 194.7 mK, respectively.; National Natural Science Foundation of China [61036006, 61275104, 61377109]; SCI(E); EI; ARTICLE; ma/wei@pku.edu.cn; wangsy2011@pku.edu.cn; wenyzheng@pku.edu.cn; yjzhao@bit.edu.cn; kylind@bit.edu.cn; yuxm@pku.edu.cn; 3; 582-591; 24
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/419680]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, Wei,Wang, Shuyang,Wen, Yongzheng,et al. Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2015.
APA	Ma, Wei,Wang, Shuyang,Wen, Yongzheng,Zhao, Yuejin,Dong, Liquan,&Yu, Xiaomei.(2015).Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS.
MLA	Ma, Wei,et al."Uncooled Focal Plane Array for Multiband IR Imaging Using Optical-Readout Bimaterial Cantilevers".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2015).