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	The effect of dielectric charging on capacitive MEMS switch
	Huang, Qin Wen ; Li, Xiang Guang ; Wang, Yun Hui ; Jia, Yu-Bin
	2014
英文摘要	Based on a one-dimensional model of dielectric charging for capacitive RF MEMS switches, the accumulated charge density and actuation voltage shift were simulated. The results illustrate that rougher surface can reduce dielectric charging, so the dielectric layer should be fabricated much rougher during deposition process. But the capacitance ratio of switch will be decreased with rougher surface, which can cause a reduction of switch performance. Thus the dielectric surface roughness should be balanced in reliability and isolation. ? (2014) Trans Tech Publications, Switzerland.; EI; 0
语种	英语
DOI标识	10.4028/www.scientific.net/AMM.511-512.732
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/412914]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Huang, Qin Wen,Li, Xiang Guang,Wang, Yun Hui,et al. The effect of dielectric charging on capacitive MEMS switch. 2014-01-01.

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