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	Development of MEMS VOA with only one shutter for dual signals simultaneous operation
	Chen, Qing Hua ; Li, Yan Mei ; Chen, Ying Jun ; Wu, Wen Gang
	2013
英文摘要	A MEMS variable optical attenuator (VOA) with only one shutter for dual signals simultaneous operation is designed for advanced tuning functions. Theoretical electro-mechanism model has also been developed to provide optimization for the VOA design. In experiment, the fabricated VOA device has demonstrated a over 40-dB attenuation range with respect to the driving voltage of one shutter, and it has also realized low polarization-dependent performance. The superior specifications make this device very promising for optical network systems and laboratory equipment. ? (2013) Trans Tech Publications, Switzerland.; EI; 0
语种	英语
DOI标识	10.4028/www.scientific.net/AMR.709.481
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/411797]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Chen, Qing Hua,Li, Yan Mei,Chen, Ying Jun,et al. Development of MEMS VOA with only one shutter for dual signals simultaneous operation. 2013-01-01.

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