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	SINGLE-STEP FABRICATION OF SUPERHYDROPHOBIC MICRO/NANO DUAL-SCALE PDMS FILM REPLICATED FROM ULTRA-LOW-SURFACE-ENERGY MOLD
	Zhang, Xiao-Sheng ; Jin, Bai-Hong ; Chu, Shi-Gan ; Peter, Nicolas ; Zhu, Fu-Yun ; Zhang, Hai-Xia
	2013
英文摘要	This paper reports a single-step process to fabricate super-hydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) membrane replicated directly from ultra-low-surface-energy MNDS silicon substrate at high temperature without surfactant coating. MNDS silicon surface with ultra-low surface energy was simply fabricated by an improved deep reactive ion etching (DRIE) process. The huge reduction of surface energy and the formation of high-density nanostructures (i.e. nano-tips) on well-designed microstructures (i.e. inverted pyramids and V-shape grooves) were realized simultaneously due to the enhancement of passivation step of DRIE process. Therefore, the high-temperature thermal cross-linking process, even higher than 180 degrees C, can be directly utilized on the pattern replication of PDMS without surfactant coating to strengthen the precision. After studying of heating temperature and time, the MNDS PDMS membrane with the static contact angle (CA) of similar to 151 degrees was realized at the optimized temperature of 85 degrees C after 1-hour heating. The plasma treatment of the same improved DRIE process was utilized to enhance the hydrophobicity. The CA achieved up to more than 160 degrees, while the CA hysteresis was reduced to below 10 degrees.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000320549200085&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 1
语种	英语
DOI标识	10.1109/MEMSYS.2013.6474245
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/405819]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Xiao-Sheng,Jin, Bai-Hong,Chu, Shi-Gan,et al. SINGLE-STEP FABRICATION OF SUPERHYDROPHOBIC MICRO/NANO DUAL-SCALE PDMS FILM REPLICATED FROM ULTRA-LOW-SURFACE-ENERGY MOLD. 2013-01-01.

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