ELECTRON-OPTICAL PROPERTIES AND ABERRATIONS OF FIELD-EMISSION   MICROSOURCES

doi:10.1116/1.586670

CORC > 北京大学 > 信息科学技术学院

	ELECTRON-OPTICAL PROPERTIES AND ABERRATIONS OF FIELD-EMISSION MICROSOURCES
	XIMEN, JY ; XIMEN, HY ; ZHOU, L
刊名	journal of vacuum science technology b
	1993
关键词	SYSTEM
DOI	10.1116/1.586670
英文摘要	Because of the rapid development of microfabricating and micromachining semiconductor devices, the need to design a miniaturized electron beam system has drawn much attention. In this article, different types of field emission source were investigated by taking space charge effects into consideration and using the second order finite element method. Scaling down the dimensional sizes from the conventional field emission source to the field emission microsource, electron optical properties for these field emission sources have been systematically calculated, including spherical and chromatic aberrations, diameter of crossover, the probe size, and the brightness. The microelectron sources proposed in the present study possess better performances than the conventional ones and thus can be used to develop microscanning electron microscopes and microelectron beam writing/reading devices.; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied; SCI(E); 2; ARTICLE; 2; 275-280; 11
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/402256]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	XIMEN, JY,XIMEN, HY,ZHOU, L. ELECTRON-OPTICAL PROPERTIES AND ABERRATIONS OF FIELD-EMISSION MICROSOURCES[J]. journal of vacuum science technology b,1993.
APA	XIMEN, JY,XIMEN, HY,&ZHOU, L.(1993).ELECTRON-OPTICAL PROPERTIES AND ABERRATIONS OF FIELD-EMISSION MICROSOURCES.journal of vacuum science technology b.
MLA	XIMEN, JY,et al."ELECTRON-OPTICAL PROPERTIES AND ABERRATIONS OF FIELD-EMISSION MICROSOURCES".journal of vacuum science technology b (1993).