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	Bulk Micromachined Resonant Accelerometer
	Zhong, Ying ; Jia, Yubin ; Hao, Yilong ; Zhang, Guoxiong
	2003
英文摘要	This paper presents a novel design of silicon micromachined resonant accelerometer, in which double-ended tuning forks (DETFs) are implemented. Each fork serves as a stress-sensitive resonator. If an external acceleration is applied, the inertial force generated by the proof mass would impose on the fork axially through the cantilever, and there would be a shift in the fork's natural frequency. Electrostatic combs are mounted on the tines for driving and sensing the fork's resonant frequency. This sensor can be fabricated in bulk micromachined process, and its sensitivity is about 2Hz/g by finite element method.; EI; 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/329367]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhong, Ying,Jia, Yubin,Hao, Yilong,et al. Bulk Micromachined Resonant Accelerometer. 2003-01-01.

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