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	The electro-thermal response properties of miro pirani vacuum gauge
	Zhang, Jinwen ; Wang, Long ; Wang, Xin ; Jiang, Wei
	2010
英文摘要	In this paper, a micro vacuum pirani gauge made of single crystal silicon has been developed and its temperature and DC current response properties in different pressures were firstly studied detailedly. The resistance of it increases with the temperature exponentially. There is a current threshold resulting from the materials characteristics and the precision of the instrument at low pressure. And the DC current threshold increases with the pressure. Besides, Higher DC current and lower pressure will leads to longer temperature stabilized time. ?2010 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/ICSICT.2010.5667555
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/295468]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Zhang, Jinwen,Wang, Long,Wang, Xin,et al. The electro-thermal response properties of miro pirani vacuum gauge. 2010-01-01.

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