QQ客服 官方微博 反馈留言

	Uncooled multi-band IR imaging using bimaterial cantilever FPA
	Ma, Wei ; Wang, Shuyang ; Wen, Yongzheng ; Zhao, Yuejin ; Dong, Liquan ; Liu, Ming ; Liu, Xiaohua ; Yu, Xiaomei
	2014
英文摘要	This paper presents the design, fabrication and performance of a 256??256 bimaterial cantilever focal plane array (FPA) which is able to work in the three infrared (IR) atmospheric windows of 1??2.5??m, 3??5??m and 8??14??m simultaneously. The FPA employs a silicon-framed structure by selectively etching away the substrate with Deep Reactive Ion Etching technique, and a stacked layer of chromium and SiNx serves as the multi-band absorber. The images of short wavelength, middle wavelength and long wavelength infrared were captured successfully with the same FPA by combining the Chromium nano-film with silicon nitride as the multi-band IR absorber. The measured sensitivity of the FPA is 0.18??m/K. ? 2014 IEEE.; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1109/MEMSYS.2014.6765869
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/294465]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Ma, Wei,Wang, Shuyang,Wen, Yongzheng,et al. Uncooled multi-band IR imaging using bimaterial cantilever FPA. 2014-01-01.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。