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	The development of the nanocrystal silicon film FEA pressure sensor
	Liu, JH ; Lin, HY ; Zhang, X
	2001
关键词	ARRAY
英文摘要	A novel field emission array (FEA) has been fabricated using a new method, which greatly reduces the whole process difficulty. Factors influencing the emitting current of the FEA are analyzed in theory and nano-crystal silicon film is chosen to deposit on the FEA to improve the emitting characteristic due to its excellent conductivity and particular configuration. Emitting characteristic of the FEA with and without nano-crystal silicon film are tested and compared. The design and the main process are proposed also.; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293956]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, JH,Lin, HY,Zhang, X. The development of the nanocrystal silicon film FEA pressure sensor. 2001-01-01.

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