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	Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch
	Yin, DQ ; Lin, JH ; Chen, QH ; Chen, ZY ; Xu, AS ; Wu, WG
	2005
关键词	MEMS optical switch torsion-mirror electrostatic driving resonance
英文摘要	A novel driving scheme utilizing the resonance effect of the micro-mirror is presented to reduce the drive voltage of the silicon-based MEMS (microelectromechanical systems) torsion-mirror optical switch. A mixed bias of DC (direct current) and AC (alternating current) is adopted to drive the torsion mirror. Both the numerical simulation and experiment results show that the driving voltage of the optical switch is reduced by nearly 50%, from more than 270V to 130V.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000227356100078&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Optics; Physics, Condensed Matter; EI; CPCI-S(ISTP); 0
语种	英语
DOI标识	10.1117/12.574098
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293671]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yin, DQ,Lin, JH,Chen, QH,et al. Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch. 2005-01-01.

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