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	Micro/nano film getters for vacuum maintenance of MEMS
	Jin, Yufeng ; Tang, Hao ; Wang, Zhenfeng
	2007
关键词	micro-electro-mechanic systems vacuum maintenance film getter
英文摘要	Vacuum packaging is very important for some micro-electro-mechanical systems (MEMS) devices to perform their basic functions properly and to enhance their reliability by keeping these devices away from harmful external environment. In order to maintain high vacuum in a cavity of MEMS devices, residual gases and leaking gases must be eliminated by embedded getter materials. Micro/Nano film getters absorbing gases inside the tiny cavity of MEMS packaging were introduced in this paper. The fabrication and characterization of micro/nano getters for MEMS applications were also presented. Various kinds of patterned getter films were prepared for different MEMS applications. The activation temperature and sorption capacity of the non-evaporable getter (NEG[1]) films was investigated. The formation of micro/nano films on the inner surface of MEMS devices is totally compatible with Si-based MEMS process and illustrates the applicability of the technique in vacuum maintenance of MEMS devices.; Materials Science, Multidisciplinary; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293362]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Jin, Yufeng,Tang, Hao,Wang, Zhenfeng. Micro/nano film getters for vacuum maintenance of MEMS. 2007-01-01.

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