A piezoresistive cantilever for lateral force detection fabricated by a   monolithic post-CMOS process

doi:10.1088/0960-1317/18/11/115001

CORC > 北京大学 > 信息科学技术学院

	A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process
	Ji, Xu ; Li, Zhihong ; Xi, Jianzhong ; Li, Juan ; Wang, Yangyuan
刊名	journal of micromechanics and microengineering
	2008
关键词	SINGLE-CRYSTAL SILICON SENSITIVITY SENSORS
DOI	10.1088/0960-1317/18/11/115001
英文摘要	This paper presents a post-CMOS process to monolithically integrate a piezoresistive cantilever for lateral force detection and signal processing circuitry. The fabrication process includes a standard CMOS process and one more lithography step to micromachine the cantilever structure in the post-CMOS process. The piezoresistors are doped in the CMOS process but defined in the post-CMOS micromachining process without any extra process required. A partially split cantilever configuration is developed for the lateral force detection. The piezoresistors are self-aligned to the split cantilever, and therefore the width of the beam is only limited by lithography. Consequently, this kind of cantilever potentially has a high resolution. The preliminary experimental results show expected performances of the fabricated piezoresistors and electronic circuits.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000260263900001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics; SCI(E); EI; 0; ARTICLE; 11; 18
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/292056]
专题	信息科学技术学院工学院
推荐引用方式 GB/T 7714	Ji, Xu,Li, Zhihong,Xi, Jianzhong,et al. A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process[J]. journal of micromechanics and microengineering,2008.
APA	Ji, Xu,Li, Zhihong,Xi, Jianzhong,Li, Juan,&Wang, Yangyuan.(2008).A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process.journal of micromechanics and microengineering.
MLA	Ji, Xu,et al."A piezoresistive cantilever for lateral force detection fabricated by a monolithic post-CMOS process".journal of micromechanics and microengineering (2008).