Non-planar surface bonding with spray-coated SU-8 as adhesive layer

doi:10.1049/mnl.2012.0582

CORC > 北京大学 > 信息科学技术学院

	Non-planar surface bonding with spray-coated SU-8 as adhesive layer
	Li, Nannan ; He, Shuwei ; Zhao, Qiancheng ; Zhang, Shibin ; Chen, Jing
刊名	micro nano letters
	2012
DOI	10.1049/mnl.2012.0582
英文摘要	In this study, substrates with a large topography were aligned and bonded, and a spray-coated SU-8 was employed as the adhesive layer between two complementary non-planar surfaces. Both wafer-level and chip-level bonding were carried out with an alignment tolerance of 5 mu m. The bonding pairs exhibited enhanced tensile strength and shearing strength compared to that of the planar surface bonding, which was influenced by the gap between the bonding surfaces. This technology meets the requirements of the wafer-level three-dimensional structure transfer and opens up possibilities for manufacturing more complicated microelectromechanical systems devices.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000316949900018&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; SCI(E); EI; 2; ARTICLE; 12; 1220-1222; 7
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/291794]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Li, Nannan,He, Shuwei,Zhao, Qiancheng,et al. Non-planar surface bonding with spray-coated SU-8 as adhesive layer[J]. micro nano letters,2012.
APA	Li, Nannan,He, Shuwei,Zhao, Qiancheng,Zhang, Shibin,&Chen, Jing.(2012).Non-planar surface bonding with spray-coated SU-8 as adhesive layer.micro nano letters.
MLA	Li, Nannan,et al."Non-planar surface bonding with spray-coated SU-8 as adhesive layer".micro nano letters (2012).