Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters

CORC > 北京大学 > 信息科学技术学院

	Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters
	Wang, Xiaobao ; Qian, Jin ; Zhang, Dacheng
刊名	acta mechanica sinicalixue xuebao
	2004
英文摘要	Micromachined piezoresistive flowmeters with four different types of sensing structures have been designed, fabricated and tested. Piezoresistors were defined at the end of the sensors through p-diffusion, and their values were about 3.5 k??. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with the increase of flow rate of air, obeying determined relationships. The testing results show that the sensors that are designed for measuring 10L/M in full operational range have desired sensitivities. The sensor chip is manufactured with bulk-micromachining technologies, requiring a set of seven masks.; EI; 0; 2; 152-158; 20
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/262563]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Xiaobao,Qian, Jin,Zhang, Dacheng. Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters[J]. acta mechanica sinicalixue xuebao,2004.
APA	Wang, Xiaobao,Qian, Jin,&Zhang, Dacheng.(2004).Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters.acta mechanica sinicalixue xuebao.
MLA	Wang, Xiaobao,et al."Design, fabrication, testing and mechanical analysis of bulk-micromachined flowmeters".acta mechanica sinicalixue xuebao (2004).