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	A STUDY OF MINIATURIZED ELECTROSTATIC OCTUPOLE DEFLECTORS
	LIU, ZX ; XIMEN, JY
	1995
关键词	OPTICAL PROPERTIES MICROLENS SYSTEM BEAM LITHOGRAPHY ABERRATIONS
英文摘要	In this paper the computer simulation and the computational results of miniaturized electrostatic octupole deflectors have been presented. It has been shown that both axial and azimuthal fringing effects must be taken into account for such deflectors with small length-to-radius ratio. The axial fringing effects make deflection sensitivity higher, have no effects on deflection coma and chromatism coefficients, and change the behaviors of deflection field curvature, astigmatism, and distortion coefficients for the round-lens-type aberrations. The azimuthal fringing effects decrease deflection sensitivity but hardly affect any round-lens-type deflection aberration coefficients. For miniaturized electrostatic octupole deflectors the computational results also show that four-fold deflection coma, astigmatism, and distortion are all extremly small and can be completely neglected.; Instruments & Instrumentation; Nuclear Science & Technology; Physics, Particles & Fields; Spectroscopy; SCI(E); 1
语种	英语
DOI标识	10.1016/0168-9002(95)00156-5
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/258479]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	LIU, ZX,XIMEN, JY. A STUDY OF MINIATURIZED ELECTROSTATIC OCTUPOLE DEFLECTORS. 1995-01-01.

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