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	An experimental study on micro-gas sensors with strip shape tin oxide thin films
	Yu, J. ; Tang, Z. A. ; Yan, G. Z. ; Chan, P. C. H. ; Huang, Z. X.
	2009
关键词	Micro-gas sensor Micro-hotplate Tin oxide Micro-crack CERAMICS
英文摘要	Micro-cracks in tin oxide thin film may cause bad stability to the micro-hotplate (MHP) gas sensor, especially at high operation temperature or in moisture ambience. In order to reduce micro-cracks, tin oxide thin films on a 2 x 2 MHP gas sensor array are patterned as narrow strips. It is proved by SEM that micro-cracks induced by thermal stress can be greatly restrained in narrow strip shape films comparing with the traditional rectangle board film. Stability of the MHP sensors with narrow strip films was characterized by testing their resistance in air for 60 h, and their responses respectively to methane and carbon monoxide for 300 h. The results show that the strip shape SnO(2) films are really helpful to enhance stability of the MHP gas sensors. (C) 2009 Elsevier B.V. All rights reserved.; Chemistry, Analytical; Electrochemistry; Instruments & Instrumentation; SCI(E); EI; CPCI-S(ISTP); 5
语种	英语
DOI标识	10.1016/j.snb.2009.03.033
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/247165]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, J.,Tang, Z. A.,Yan, G. Z.,et al. An experimental study on micro-gas sensors with strip shape tin oxide thin films. 2009-01-01.

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