A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low   Temperature Dependence

doi:10.1109/JSEN.2011.2158819

CORC > 北京大学 > 信息科学技术学院

	A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence
	Sun, Hongzhi ; Jia, Kemiao ; Liu, Xuesong ; Yan, Guizhen ; Hsu, Yu-Wen ; Fox, Robert M. ; Xie, Huikai
刊名	ieee sensors journal
	2011
关键词	CMOS-MEMS differential difference amplifier (DDA) gyroscopes microelectromechanical systems (MEMS) monolithic integration MICROMACHINED INERTIAL SENSORS LOW-NOISE ACCELEROMETER AMPLIFIER
DOI	10.1109/JSEN.2011.2158819
英文摘要	This paper describes an interface circuit design for monolithic CMOS-MEMS gyroscopes, based on a novel differential difference amplifier (DDA) with high gain, low temperature and process dependence, low noise, and low power consumption. The DDA achieves a 4 fF equivalent transcapacitance with a 0.01%/degrees C temperature variation. The DDA-based interface circuit has been integrated with a z-axis gyroscope on a foundry CMOS chip. A 4.5 zF / root Hz input-referred noise is achieved at 2 kHz, with a total power consumption of 4.25 mW. The gyroscope is fabricated with a post-CMOS bulk micromachining process and the device achieves a sensitivity of 1.2 mV /degrees /s and a noise floor 0.05 degrees /s/root Hz; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000296106100004&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied; SCI(E); EI; 3; ARTICLE; 11; 2740-2748; 11
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/237999]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Sun, Hongzhi,Jia, Kemiao,Liu, Xuesong,et al. A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence[J]. ieee sensors journal,2011.
APA	Sun, Hongzhi.,Jia, Kemiao.,Liu, Xuesong.,Yan, Guizhen.,Hsu, Yu-Wen.,...&Xie, Huikai.(2011).A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence.ieee sensors journal.
MLA	Sun, Hongzhi,et al."A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence".ieee sensors journal (2011).