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	An x-axis micromachined gyroscope with doubly decoupled oscillation modes
	Liu, X.S. ; Yang, Z.C. ; Chi, X.Z. ; Cui, J. ; Ding, H.T. ; Guo, Z.Y. ; Lv, B. ; Yan, G.Z.
	2008
英文摘要	In this paper, a doubly decoupled x-axis gyroscope with novel torsional sensing comb capacitors is presented. The doubly decoupled design is more efficient to suppress mechanical coupling of gyroscope. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, then it can work even at atmosphere. Moreover, the sensing capacitors adopt asymmetrical comb fingers so that they can differentially detect out-of-plane torsional movements. The fabrication process of the gyroscope is compatible with z-axis gyroscope process, which makes it potential to realize low cost monolithic MIMU (miniature inertial measurement unit) without vacuum packaging. The gyroscope was fabricated and tested. The sensitivity is 3mV/??/s while the nonlinearity is 1.1% at atmosphere. The noise floor is 0.1??/s/Hz1/2. ?2008 IEEE.; EI; 0
语种	英语
DOI标识	10.1109/MEMSYS.2008.4443792
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153617]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, X.S.,Yang, Z.C.,Chi, X.Z.,et al. An x-axis micromachined gyroscope with doubly decoupled oscillation modes. 2008-01-01.

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