Design of high-sensitivity cantilever and its monolithic integration   with CMOS circuits

doi:10.1109/JSEN.2007.891938

CORC > 北京大学 > 信息科学技术学院

	Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits
	Yu, Xiaomei ; Tang, Yaquan ; Zhang, Haitao ; Li, Ting ; Wang, Wei
刊名	ieee sensors journal
	2007
关键词	cantilever monolithic integration post-CMOS process silicon-on-insulator (SOI) CMOS PIEZORESISTIVE CANTILEVERS OPTIMIZATION READOUT SENSORS ARRAY
DOI	10.1109/JSEN.2007.891938
英文摘要	Rectangular piezoresistive cantilevers with stress concentration holes opened were designed and fabricated in order to increase the response signals of piezoresistive cantilever first. Both the simulations and the measurements on the cantilever sensitivity show that this design can obviously result in an improvement on the displacement sensitivity of the piezoresistive cantilever. After a characterization study on the piezoresistive cantilever, a monolithic integration of the microcantilever array with a complementary metal-oxide-semiconductor (CMOS) readout circuitry based on the silicon-on-insulator (SOI) CMOS and the SOI micromachining technologies was designed. A cantilever array, a digital controlled multiplexer, and an instrumentation amplifier compose the integrated sensor system, and post-CMOS process was designed to fabricate the integrated system. The measurement results on the SOI CMOS circuitry of the integrated system prove a feasibility of the integration design.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000245226600027&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Instruments & Instrumentation; Physics, Applied; SCI(E); EI; 19; ARTICLE; 3-4; 489-495; 7
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/153013]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Xiaomei,Tang, Yaquan,Zhang, Haitao,et al. Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits[J]. ieee sensors journal,2007.
APA	Yu, Xiaomei,Tang, Yaquan,Zhang, Haitao,Li, Ting,&Wang, Wei.(2007).Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits.ieee sensors journal.
MLA	Yu, Xiaomei,et al."Design of high-sensitivity cantilever and its monolithic integration with CMOS circuits".ieee sensors journal (2007).