Fabrication and characteristics of high-performance and high-stability   aluminum-doped zinc oxide thin-film transistors

doi:10.7567/JJAP.53.04EJ07

CORC > 北京大学 > 信息科学技术学院

	Fabrication and characteristics of high-performance and high-stability aluminum-doped zinc oxide thin-film transistors
	Shan, Dongfang ; Han, Dedong ; Huang, Fuqing ; Tian, Yu ; Zhang, Suoming ; Qi, Lin ; Cong, Yingying ; Zhang, Shengdong ; Zhang, Xing ; Wang, Yi
刊名	日本应用物理学杂志
	2014
关键词	SEMICONDUCTOR
DOI	10.7567/JJAP.53.04EJ07
英文摘要	Fully transparent aluminum-doped zinc oxide (AZO) thin-film transistors (TFTs) were successfully fabricated on glass substrates at room temperature. Superior properties, such as a high saturation mobility of 59.3 cm(2) V-1 s(-1), a positive threshold voltage of 1.3V, a steep subthreshold swing of 122.9mV/dec, an off-state current on the order of 10(-12) A, and an on/off ratio of 2.7 x 10(8), were obtained. The electrical properties of the AZO TFTs were successively studied within a period of six months. Small property degenerations could be observed from the test results obtained within the study period, which proved the high-performance and high-stability characteristics of AZO TFTs. Furthermore, hysteresis loop scanning of AZO TFTs was performed, and a small hysteresis could be detected in the scanning curves, which suggested the superior properties of a dielectric and a channel-insulator interface. Lastly, we succeeded in manufacturing an organic LED (OLED) flat panel display panel driven by AZO TFTs and obtained an excellent display effect from it. We believe that AZO TFTs are a promising candidate successor to Si-based TFTs in next-generation flat panel displays. (C) 2014 The Japan Society of Applied Physics; Physics, Applied; SCI(E); EI; 0; ARTICLE; wangyi@ime.pku.edu.cn; 4,SI; 53
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/152133]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Shan, Dongfang,Han, Dedong,Huang, Fuqing,et al. Fabrication and characteristics of high-performance and high-stability aluminum-doped zinc oxide thin-film transistors[J]. 日本应用物理学杂志,2014.
APA	Shan, Dongfang.,Han, Dedong.,Huang, Fuqing.,Tian, Yu.,Zhang, Suoming.,...&Wang, Yi.(2014).Fabrication and characteristics of high-performance and high-stability aluminum-doped zinc oxide thin-film transistors.日本应用物理学杂志.
MLA	Shan, Dongfang,et al."Fabrication and characteristics of high-performance and high-stability aluminum-doped zinc oxide thin-film transistors".日本应用物理学杂志 (2014).