High-Throughput Fabrication of Flexible and Transparent All-Carbon Nanotube Electronics

doi:10.1002/advs.201700965

CORC > 金属研究所 > 中国科学院金属研究所

	High-Throughput Fabrication of Flexible and Transparent All-Carbon Nanotube Electronics
	Chen, YY ; Sun, Y ; Zhu, QB ; Wang, BW ; Yan, X 1; Qiu, S ; Li, QW ; Hou, PX ; Liu, C ; Sun, DM
刊名	ADVANCED SCIENCE
	2018-05-01
卷号	5 期号:5 页码:-
关键词	carbon nanotubes flexible electronics photosensitive dry films thin-film transistors transparent electronics
ISSN号	2198-3844
DOI	10.1002/advs.201700965
英文摘要	This study reports a simple and effective technique for the high-throughput fabrication of flexible all-carbon nanotube (CNT) electronics using a photosensitive dry film instead of traditional liquid photoresists. A 10 in. sized photosensitive dry film is laminated onto a flexible substrate by a roll-to-roll technology, and a 5 mu m pattern resolution of the resulting CNT films is achieved for the construction of flexible and transparent all-CNT thinfilm transistors (TFTs) and integrated circuits. The fabricated TFTs exhibit a desirable electrical performance including an on-off current ratio of more than 10(5), a carrier mobility of 33 cm(2) V-1 s(-1), and a small hysteresis. The standard deviations of on-current and mobility are, respectively, 5% and 2% of the average value, demonstrating the excellent reproducibility and uniformity of the devices, which allows constructing a large noise margin inverter circuit with a voltage gain of 30. This study indicates that a photosensitive dry film is very promising for the low-cost, fast, reliable, and scalable fabrication of flexible and transparent CNT-based integrated circuits, and opens up opportunities for future high-throughput CNT-based printed electronics.
学科主题	Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
语种	英语
WOS记录号	WOS:000435852800021
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/80196]
专题	金属研究所_中国科学院金属研究所
作者单位	1.[Chen, Yong-Yang 2.Northeastern Univ, Coll Informat Sci & Engn, 3-11 Wenhua Rd, Shenyang 110819, Liaoning, Peoples R China 3.[Sun, Yun 4.Zhu, Qian-Bing 5.Wang, Bing-Wei 6.Hou, Peng-Xiang 7.Liu, Chang 8.Sun, Dong-Ming 9.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, 72 Wenhua Rd, Shenyang 110016, Liaoning, Peoples R China 10.[Zhu, Qian-Bing
推荐引用方式 GB/T 7714	Chen, YY,Sun, Y,Zhu, QB,et al. High-Throughput Fabrication of Flexible and Transparent All-Carbon Nanotube Electronics[J]. ADVANCED SCIENCE,2018,5(5):-.
APA	Chen, YY.,Sun, Y.,Zhu, QB.,Wang, BW.,Yan, X.,...&Cheng, HM.(2018).High-Throughput Fabrication of Flexible and Transparent All-Carbon Nanotube Electronics.ADVANCED SCIENCE,5(5),-.
MLA	Chen, YY,et al."High-Throughput Fabrication of Flexible and Transparent All-Carbon Nanotube Electronics".ADVANCED SCIENCE 5.5(2018):-.