Chemical solution deposition is used to prepare Co5.47N thin films on LaAlO3 single crystal substrates. The derived thin films are phase-pure and polycrystalline. Annealing temperature effects on microstructures, magnetic and transport properties are investigated. The thin films annealed under 800 and 900 degrees C shows dense surface morphologies, whereas the 1000 degrees C annealing temperature will lead to dewetting. The derived Co5.47N thin films are ferromagnetic with Curie temperature higher than 632 K. The roomtemperature saturation magnetization is enhanced and the coercivity is decreased with increasing the annealing temperature from 800 to 1000 degrees C. The temperature dependent resistivity shows metallic behaviors, and it is decreased with increasing the annealing temperature. The results will provide a facile route to prepare Co5.47N thin films using chemical solution deposition. (C) 2018 Elsevier B.V. All rights reserved.