Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells

doi:10.1166/jnn.2017.13009

	Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells
	Zhang, TC; Liu J(刘静); Zhang XS(张新帅); Sun GJ(孙钢杰); Liu, J; Zhang, XS; Sun, GJ; Wang, YT; Wang, B; Yi, FT
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2017
卷号	17 期号:3 页码:2012-2018
关键词	Nanopillars CsCl Self-Assembly Unpolished Substrates Commercial Silicon Based Solar Cell
ISSN号	1533-4880
DOI	10.1166/jnn.2017.13009
文献子类	Article
英文摘要	Random nanopillars are fabricated on unpolished commercial substrates by cesium chloride ( CsCl) self-assembly lithography, and they are applied in commercial solar cells for the first time. The CsCl nanoislands with average diameter ranging from 100 to 700 nm are fabricated on unpolished silicon surface. With the CsCl nanoislands as masks, the nanopillars with average diameter from 50 to 600 nm and height from 100 nm to 1.5 mu m are fabricated by inductively coupled plasma ( ICP) dry etching. This unpolished silicon wafer with nanopillars of 300 nm average diameter and 600 nm height has low reflection of less than 10% for wavelength ranging from 400 to 1000 nm, which is much lower than that without nanopillars. After a thin layer of 80 nm SiNx is deposited on the top of nanopillars, the reflectance reduces to less than 5% in a broad wavelength range from 300 nm to 1000 nm and reaches the minimum of 1.2% around 500 nm. In addition, following the standard processes, we have successfully integrated the nanopillars into 125 mmx125 mm commercial silicon based solar cells, which achieving a final efficiency of 17.74% with a short circuit current of 5.54 A and an open circuit voltage of 621.0 mV.
电子版国际标准刊号	1533-4899
WOS关键词	SILICON ; FABRICATION ; NANOWIRES ; ARRAYS ; ANTIREFLECTION ; LITHOGRAPHY ; SURFACE ; GROWTH ; RESIST
WOS研究方向	Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
WOS记录号	WOS:000397126500063
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/284939]
专题	高能物理研究所_多学科研究中心
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Zhang, TC,Liu J,Zhang XS,et al. Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2017,17(3):2012-2018.
APA	Zhang, TC.,刘静.,张新帅.,孙钢杰.,Liu, J.,...&伊福廷.(2017).Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,17(3),2012-2018.
MLA	Zhang, TC,et al."Nanopillars on Unpolished Substrates and Their Application in Large-Area Solar Cells".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 17.3(2017):2012-2018.