BAW sensor readout circuit based on Pierce oscillator architecture

doi:10.1117/12.2278370

	BAW sensor readout circuit based on Pierce oscillator architecture
	Gao, Yang ; Yin, Xi-Yang ; Han, Bin ; Wang, Yu-Hang ; Wang YH(王宇航)
刊名	Proceedings of SPIE - The International Society for Optical Engineering
	2017
卷号	10438 页码:104380B
关键词	MEMS (Micro-Electro-Mechanical System) BAW (bulk acoustic wave) resonator sensor read-out circuit oscillator phase noise frequency stability
ISSN号	0277-786X
DOI	10.1117/12.2278370
文献子类	Proceedings Paper
英文摘要	Bulk Acoustic Wave Resonators (BAWRs) have been well developed both as filters and as high sensitivity sensors in recent years. In contrast to traditional megahertz quartz resonators, BAWRs offer significant increases in resonant frequency, typically operating in gigahertz regimes. This translates into a potential sensitivity increase of more than three orders of magnitude over traditional QCM (Quartz Crystal Microbalance) devices. Given the micrometer-scale size of BAW sensor-head, read-out circuitry can monolithic integrated with this GHz transducer is urgently needed to produce small, robust, and inexpensive sensor systems. A BAW sensor read-out circuit prototype based on Pierce oscillator architecture is fulfilled in this paper. Based on the differential measurement scheme, two uniform BAWRs are used to constitute two BAW oscillators as a reference and a measurement branch respectively. The resonant frequency shift caused by the measurand is obtained by mixing and filtering the two oscillator signals. Then, the intermediate signal is amplified, shaped and converted to a digital one. And a FPGA is used for frequency detection. Taking 2 GHz BAW mass sensor as a case study, deign procedure are given in details. Simulation and experimental results reveal a 0-99 MHz frequency shift measurement range. Main factors affecting phase noise of the BAW oscillator (i.e. mainly frequency stability of the BAW sensor readout circuit) are also discussed for further optimizations.
电子版国际标准刊号	1996-756X
会议地点	Warsaw, POLAND
会议日期	SEP 13-14, 2017
WOS研究方向	Remote Sensing ; Optics ; Imaging Science & Photographic Technology
语种	英语
ISBN号	978-1-5106-1341-6; 978-1-5106-1340-9
WOS记录号	WOS:000418449600007
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/284200]
专题	高能物理研究所_实验物理中心
作者单位	1.Chinese Acad Sci, State Key Lab Particle Detect & Elect, Inst High Energy Phys, Beijing 100049, Peoples R China 2.Southwest Univ Sci & Technol, Sch Informat Engn, Mianyang 621010, Sichuan, Peoples R China 3.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Sichuan, Peoples R China
推荐引用方式 GB/T 7714	Gao, Yang,Yin, Xi-Yang,Han, Bin,et al. BAW sensor readout circuit based on Pierce oscillator architecture[J]. Proceedings of SPIE - The International Society for Optical Engineering,2017,10438:104380B.
APA	Gao, Yang,Yin, Xi-Yang,Han, Bin,Wang, Yu-Hang,&王宇航.(2017).BAW sensor readout circuit based on Pierce oscillator architecture.Proceedings of SPIE - The International Society for Optical Engineering,10438,104380B.
MLA	Gao, Yang,et al."BAW sensor readout circuit based on Pierce oscillator architecture".Proceedings of SPIE - The International Society for Optical Engineering 10438(2017):104380B.