A self-assembly optimization method for BAW filter layout design

doi:10.1117/12.2278209

	A self-assembly optimization method for BAW filter layout design
	Gao, Yang ; Zhang, Da-Peng ; Jia, Le ; Wen, Shu-Wen ; Wen SW(文数文)
刊名	Proceedings of SPIE - The International Society for Optical Engineering
	2017
卷号	10438 页码:104380A
关键词	Micro-Electro-Mechanical System (MEMS) bulk acoustic wave (BAW) filter resonator layout software
ISSN号	0277-786X
DOI	10.1117/12.2278209
文献子类	Proceedings Paper
英文摘要	In order to reduce the volume of the filter and increase the number of chips on the wafer, while ensure the filter performance, a design method of the bulk acoustic wave (BAW) ladder filter is proposed. This layout design method consists of 11 design criteria and a 6-step flow. The 11 design criteria limit the shape and position of the BAW resonators (BAWRs), the distance between the BAWRs, the distance between the BAWRs and the pads and the interconnecting wire. The layout design flow has 6 steps. 1) Preset the shape of each BAWR (square/pentagon) according to its active area values. 2) Add an auxiliary circumcircle for each BAWR, tightly align all the series resonator circumcircles along a central line in order, and mate the corresponding electronically neighboring parallel resonator circumcircles one by one at a position above/below the center line. This makes an initial 3-row and n-column 2D arrangement, and the column number N is determined by the filter order. 3) Fix the very first series resonator circumcircle position and incrementally "compress" the initially self-assembled 3-row structure along the row width direction until the row height for row width bargain is no more cost effective. 4) Apodize the square series resonators and fine-tune each resonator's shape and rotation according to above-mentioned related design criteria. 5) Wiring BAWRs and pads together. 6) A combined acoustic-electromagnetic BAW filter simulation method is used to validate the layout result. In a 5-order BAW ladder filter layout demo case, a layout fill ratio over 44% is obtained. An autolayout program "BAW-filter Auto-layout Tool (BAT (R))" based on the presented method is also presented.
电子版国际标准刊号	1996-756X
会议地点	Warsaw, POLAND
会议日期	SEP 13-14, 2017
WOS研究方向	Remote Sensing ; Optics ; Imaging Science & Photographic Technology
语种	英语
ISBN号	978-1-5106-1341-6; 978-1-5106-1340-9
WOS记录号	WOS:000418449600006
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/284199]
专题	高能物理研究所_实验物理中心
作者单位	1.Chinese Acad Sci, State Key Lab Particle Detect & Elect, Inst High Energy Phys, Beijing 100049, Peoples R China 2.Southwest Univ Sci & Technol, Sch Informat Engn, Mianyang 621010, Sichuan, Peoples R China 3.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Sichuan, Peoples R China
推荐引用方式 GB/T 7714	Gao, Yang,Zhang, Da-Peng,Jia, Le,et al. A self-assembly optimization method for BAW filter layout design[J]. Proceedings of SPIE - The International Society for Optical Engineering,2017,10438:104380A.
APA	Gao, Yang,Zhang, Da-Peng,Jia, Le,Wen, Shu-Wen,&文数文.(2017).A self-assembly optimization method for BAW filter layout design.Proceedings of SPIE - The International Society for Optical Engineering,10438,104380A.
MLA	Gao, Yang,et al."A self-assembly optimization method for BAW filter layout design".Proceedings of SPIE - The International Society for Optical Engineering 10438(2017):104380A.