Model-free optical surface reconstruction from deflectometry data

doi:10.1117/12.2320745

	Model-free optical surface reconstruction from deflectometry data
	Graves, L.R.1; Choi, H.1; Zhao, W.2; Oh, C.J.1; Su, P.3; Su, T.4,5; Kim, D.W.1
	2018
会议日期	AUG 20-22, 2018AUG 20-22, 2018
会议地点	San Diego, CASan Diego, CA
关键词	Deflectometry model-free metrology freeform
卷号	10742
DOI	10.1117/12.2320745
页码	107420Y
英文摘要	Deflectometry is a metrology method able to measure large surface slope ranges that can achieve surface reconstruction accuracy similar to interferometry, making it ideal for freeform metrology. While it is a non-null method, deflectometry previously required a precise model of the unit under test to accurately reconstruct the surface. However, there are times when no such model exists, such as during the grinding phase of an optic. We developed a model-free iterative data processing technique which provides improved deflectometry surface reconstruction of optics when the correct surface model is unknown. The new method iteratively reconstructs the optical surface, leading to a reduction in error in the final reconstructed surface. Software simulations measuring the theoretical performance limitations of the model-free processing technique as well as a real-world test characterizing actual performance were performed. The method was implemented in a deflectometry system and a highly freeform surface was measured and reconstructed using both the iterative technique and a traditional non-iterative technique. The results were compared to a commercial interferometric measurement of the optic. The reconstructed surface departure from interferometric results was reduced from 44.39 mu m RMS with traditional non-iterative deflectometry down to 5.20 mu m RMS with the model-free technique reported.
会议录	Proceedings of SPIE - OPTICAL MANUFACTURING AND TESTING XII
文献子类	C
语种	英语
ISSN号	0277-786X
WOS记录号	WOS:000452438100026
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9133]
专题	超精密总体部
作者单位	1.College of Optical Sciences, Univ. of Arizona, 1630 E. University Blvd, Tucson; AZ; 85721, United States; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 3.ASML Corporation, 77 Danbury Road, Wilton; TC; 0689, United States; 4.KLA-Tencor Corporation, 3 Technology Dr, Miltipas; CA; 95035, United States; 5.Steward Observatory, University of Arizona, 933 N. Cherry Ave, Tucson; AZ; 85719, United States
推荐引用方式 GB/T 7714	Graves, L.R.,Choi, H.,Zhao, W.,et al. Model-free optical surface reconstruction from deflectometry data[C]. 见:. San Diego, CASan Diego, CA. AUG 20-22, 2018AUG 20-22, 2018.