Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique

doi:10.1364/OL.43.002110

	Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique
	Graves, Logan R.1; Choi, Heejoo 1; Zhao, Wenchuan 2; Oh, Chang Jin 1; Su, Peng 3; Su, Tianquan 4; Kim, Dae Wook 1,5
刊名	OPTICS LETTERS
	2018-05-01
卷号	43 期号:9 页码:2110-2113
关键词	Data handling Interferometry Surface reconstruction
ISSN号	0146-9592
DOI	10.1364/OL.43.002110
文献子类	J
英文摘要	We present a novel model-free iterative data-processing approach that improves surface reconstruction accuracy for deflectometry tests of unknown surfaces. This new processing method iteratively reconstructs the surface, leading to reduced error in the final reconstructed surface. The method was implemented in a deflectometry system, and a freeform surface was tested and compared to interferometric test results. The reconstructed departure from interferometric results was reduced from 15.80 mu m RMS with model-based deflectometry down to 5.20 mu m RMS with the iterative technique reported here. (C) 2018 Optical Society of America
语种	英语
WOS记录号	WOS:000431179400043
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9392]
专题	光电技术研究所_先光中心
作者单位	1.College of Optical Sciences, University of Arizona, 1630 E. University Blvd., Tucson; AZ; 85721, United States; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 3.ASML Corporation, 77 Danbury Road, Wilton; CT; 06897, United States; 4.KLA-Tencor Corporation, 3 Technology Dr., Miltipas; CA; 95035, United States; 5.Steward Observatory, University of Arizona, 933 N. Cherry Ave., Tucson; AZ; 85719, United States
推荐引用方式 GB/T 7714	Graves, Logan R.,Choi, Heejoo,Zhao, Wenchuan,et al. Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique[J]. OPTICS LETTERS,2018,43(9):2110-2113.
APA	Graves, Logan R..,Choi, Heejoo.,Zhao, Wenchuan.,Oh, Chang Jin.,Su, Peng.,...&Kim, Dae Wook.(2018).Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique.OPTICS LETTERS,43(9),2110-2113.
MLA	Graves, Logan R.,et al."Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique".OPTICS LETTERS 43.9(2018):2110-2113.