Improving the performance of single point diamond turning surface with ion beam figuring

doi:10.1016/j.ijleo.2018.07.039

	Improving the performance of single point diamond turning surface with ion beam figuring
	Huang, Yuetian 1,2; Fan, Bin 1; Wan, Yongjian 1; Li, Shijie 3
刊名	OPTIK
	2018
卷号	172 页码:540-544
关键词	Single point diamond turning Turning marks Ion beam figuring Surface precision
ISSN号	0030-4026
DOI	10.1016/j.ijleo.2018.07.039
文献子类	J
英文摘要	Single point diamond turning (SPDT) can directly produce high precision optical parts, but some regularity micro structure in residual surface, and turning processing characteristics limit the surface quality to further improve. Ion beam figuring (IBF), as the last process of optical processing, can remove certain mid and high frequency errors, improve the surface performances without destroying their forms. Therefore, it is proposed to combine SPDT and IBF to manufacturing ultra-high precision surface. Two samples of diamond-turned sphere aluminum mirror were used in this experiment. One samples with surface PV and RMS 226 nm and 12.6 nm decreased to 113 nm and 7.7 run after ion beam figuring, another sample was improved in the same degree, and the turning marks is removed with surface roughness decreased to 2.8 nm from 3 nm. The experimental results indicate that IBF can remove the turning marks and improve the surface precision in a certain range without destroying the surface form.
WOS关键词	REMOVAL ; MARKS ; JET
语种	英语
WOS记录号	WOS:000445714700066
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9355]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; Sichuan; 610209, China; 2.Graduate University of Chinese Academy of Sciences, Beijing; 100049, China; 3.Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, Xi'an Technological University, Xi'an; Shaanxi; 710032, China
推荐引用方式 GB/T 7714	Huang, Yuetian,Fan, Bin,Wan, Yongjian,et al. Improving the performance of single point diamond turning surface with ion beam figuring[J]. OPTIK,2018,172:540-544.
APA	Huang, Yuetian,Fan, Bin,Wan, Yongjian,&Li, Shijie.(2018).Improving the performance of single point diamond turning surface with ion beam figuring.OPTIK,172,540-544.
MLA	Huang, Yuetian,et al."Improving the performance of single point diamond turning surface with ion beam figuring".OPTIK 172(2018):540-544.