Plasmonic direct writing lithography with a macroscopical contact probe

doi:10.1016/j.apsusc.2018.01.304

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微细加工光学技术国家重点实验室（开放室）

	Plasmonic direct writing lithography with a macroscopical contact probe
	Huang, Yuerong 1; Liu, Ling 2; Wang, Changtao 2; Chen, Weidong 1; Liu, Yunyue 1; Li, Ling 1
刊名	APPLIED SURFACE SCIENCE
	2018-05-31
卷号	441 页码:99-104
关键词	Nanolithography Surface plasmons Nanostructure Contact probe
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2018.01.304
文献子类	J
英文摘要	In this work, we design a plasmonic direct writing lithography system with a macroscopical contact probe to achieve nanometer scale spots. The probe with bowtie-shaped aperture array adopts spring hinge and beam deflection method (BDM) to realize near-field lithography. Lithography results show that a macroscopical plasmonic contact probe can achieve a patterning resolution of around 75 nm at 365 nm wavelength, and demonstrate that the lithography system is promising for practical applications due to beyond the diffraction limit, low cost, and simplification of system configuration. CST calculations provide a guide for the design of recording structure and the arrangement of placing polarizer. (C) 2018 Elsevier B.V. All rights reserved.
语种	英语
WOS记录号	WOS:000427816400012
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9379]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	1.College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu; 610101, China; 2.State Key Laboratory of Optical Technologies on Nano-Fabricatiom and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu; 610209, China
推荐引用方式 GB/T 7714	Huang, Yuerong,Liu, Ling,Wang, Changtao,et al. Plasmonic direct writing lithography with a macroscopical contact probe[J]. APPLIED SURFACE SCIENCE,2018,441:99-104.
APA	Huang, Yuerong,Liu, Ling,Wang, Changtao,Chen, Weidong,Liu, Yunyue,&Li, Ling.(2018).Plasmonic direct writing lithography with a macroscopical contact probe.APPLIED SURFACE SCIENCE,441,99-104.
MLA	Huang, Yuerong,et al."Plasmonic direct writing lithography with a macroscopical contact probe".APPLIED SURFACE SCIENCE 441(2018):99-104.