Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer

doi:10.1364/AO.57.004145

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 自适应光学技术研究室（八室）

	Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer
	Fan, Zhentao 1,2,3; Tang, Yuanyuan 1,2; Wei, Kai 1,2; Zhang, Yudong 1,2
刊名	APPLIED OPTICS
	2018-05-20
卷号	57 期号:15 页码:4145-4152
关键词	Calibration Ellipsometry Focusing Light measurement Matrix algebra
ISSN号	1559-128X
DOI	10.1364/AO.57.004145
文献子类	J
英文摘要	A focusing lens consisting of two or more elements is widely used in ellipsometers for spatial resolution. In a typical ellipsometer layout, a lens is placed before the sample to focus light emerging to the sample, and another after the sample to collect the scattered light from the sample. Accurately calibrating the artifacts of the focusing lens is of great importance. In this paper, a method to improve calibration accuracy is proposed. A general analytical model is deduced to describe the artifacts of the focusing lens. This model can be applied to a system model of a dual rotating-compensator Mueller matrix ellipsometer. By adding a uniaxial crystal to calibration samples, with its optical axis neither parallel nor perpendicular to the incident plane, we can better separate artifacts from the lens before and after the sample. The system model also includes depolarization effects due to a finite numerical aperture (NA) that is related to the focusing lens. Similar effects due to the finite spectral bandwidth are also considered. Our simulation's results have validated the proposed method. (C) 2018 Optical Society of America
WOS关键词	MULTICHANNEL ELLIPSOMETER ; IN-SITU ; BIREFRINGENCE ; SPECTROSCOPY ; COEFFICIENTS ; CALCULUS ; FORMULAS ; SURFACES ; WINDOWS
语种	英语
WOS记录号	WOS:000432497400019
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9253]
专题	光电技术研究所_自适应光学技术研究室（八室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu; 610209, China; 3.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Fan, Zhentao,Tang, Yuanyuan,Wei, Kai,et al. Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer[J]. APPLIED OPTICS,2018,57(15):4145-4152.
APA	Fan, Zhentao,Tang, Yuanyuan,Wei, Kai,&Zhang, Yudong.(2018).Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer.APPLIED OPTICS,57(15),4145-4152.
MLA	Fan, Zhentao,et al."Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer".APPLIED OPTICS 57.15(2018):4145-4152.