Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation

doi:10.1117/12.2512326

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation
	Yang Kejun; Tang Yan; Hu Song; Chen Chuyi
	2018
会议日期	JUN 26-29, 2018JUN 26-29, 2018
会议地点	Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA
关键词	Super-resolution imaging image reconstruction structured illumination optical measurement micro-nano structure phase shifting
卷号	10841
DOI	10.1117/12.2512326
页码	108410H
英文摘要	The structured illumination microscopy fills an unmet need for minimally invasive tools to image micrometer and nano-scale structure. However, conventional structured illumination super-resolution methods require precise phase shift of the illumination pattern, which leads to an inefficient image reconstruction process and a complicated imaging system. To solve these problems, we propose a novel image reconstruction method using only two image to acquire the frequencies beyond the diffraction limit. This method has an efficient image post-processing, which obtains extended frequencies without accurate estimation of phase-shifting. The related simulations and experiments are carried out to demonstrate the feasibility of this method.
会议录	Proceedings of SPIE - 9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): META-SURFACE-WAVE AND PLANAR OPTICS
文献子类	C
语种	英语
ISSN号	0277-786X
WOS记录号	WOS:000461820700016
WOS关键词	RESOLUTION LIMIT ; LIGHT
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9146]
专题	光电技术研究所_微电子装备总体研究室（四室）
推荐引用方式 GB/T 7714	Yang Kejun,Tang Yan,Hu Song,et al. Efficient Super-Resolution Imaging Method for Micro-Nano Structure Based On Structured Illumination Modulation[C]. 见:. Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA. JUN 26-29, 2018JUN 26-29, 2018.