Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing
Liu, Chun-Xiao2; Li, Wei-Nan1; Yan, Sen2; Tang, Chen-Yang2; Guo, Wen-Tao2; Zhang, Jie2
SourceOptics Communications
2019-12-15
Volume453
ISSN00304018
DOI10.1016/j.optcom.2019.124344
Rank2
English Abstract

We firstly report on the planar waveguide via the single-energy proton implantation in the Yb3+-doped silicate glass. The implanted energy and fluence are 400 keV and 8.0×1016 ions/cm2, respectively. The thermal treatment at 200 °C for 1h was used to optimize waveguiding characteristics. The guided-mode spectra in the planar waveguide before and after annealing were characterized by the m-line method at 632.8 and 1539 nm. The distributions of refractive index for the as-implanted and annealed planar waveguides were reconstructed by the reflectivity calculation method. The optical characterizations were conducted at 632.8 nm using the end-fire coupling method before and after the thermal treatment. Then, the ridge waveguide was formed by the precise diamond blade dicing on the annealed planar Yb3+-doped silicate glass waveguide. The microscope image and near-field intensity profile of the ridge waveguide were investigated by the metallographic microscope and the end-face coupling system, respectively. © 2019 Elsevier B.V.

Language英语
PublisherElsevier B.V.
Citation statistics
Content Type期刊论文
URIhttp://www.corc.org.cn/handle/1471x/2514299
Collection西安光学精密机械研究所_瞬态光学技术国家重点实验室
Corresponding AuthorLiu, Chun-Xiao
Affiliation1.State Key Laboratory of Transient Optics and Photonics, Xían Institute of Optics and Precision Mechanics, Chinese Academy of Sciences (CAS), Xían; 710119, China
2.College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing; 210023, China;
Recommended Citation
GB/T 7714
Liu, Chun-Xiao,Li, Wei-Nan,Yan, Sen,et al. Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing[J]. Optics Communications,2019,453.
APA Liu, Chun-Xiao,Li, Wei-Nan,Yan, Sen,Tang, Chen-Yang,Guo, Wen-Tao,&Zhang, Jie.(2019).Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing.Optics Communications,453.
MLA Liu, Chun-Xiao,et al."Planar and ridge waveguides in Yb3+-doped silicate glasses fabricated by proton implantation and precise diamond blade dicing".Optics Communications 453(2019).
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