Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 光电信息技术研究室

	Phase unwrapping in optical metrology via denoised and convolutional segmentation networks
	Zhang JC(张俊超)1,2,3 ; Shao, Jianbo 2; Luo HB(罗海波)3 ; Liang, Rongguang 2; Tian, Xiaobo 2
刊名	OPTICS EXPRESS
	2019
卷号	27 期号:10 页码:14903-14912
ISSN号	1094-4087
产权排序	1
英文摘要	The interferometry technique is corn commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 27 pi ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentation network to identify classes. Moreover, a noise-to-noise denoised network is integrated to preprocess noisy wrapped phase. We have demonstrated the proposed method with simulated data and in a real interferometric system. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
资助项目	China Scholarship Council (CSC)[201704910730] ; National Science Foundation (NSF)[1455630]
WOS关键词	TRANSPORT
WOS研究方向	Optics
语种	英语
WOS记录号	WOS:000469220500113
资助机构	China Scholarship Council (CSC) ; National Science Foundation (NSF)
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/24727]
专题	沈阳自动化研究所_光电信息技术研究室
通讯作者	Liang, Rongguang
作者单位	1.University of Chinese Academy of Sciences, Beijing 100049, China 2.College of Optical Sciences, University of Arizona, Tucson, AZ 85721, United States 3.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式 GB/T 7714	Zhang JC,Shao, Jianbo,Luo HB,et al. Phase unwrapping in optical metrology via denoised and convolutional segmentation networks[J]. OPTICS EXPRESS,2019,27(10):14903-14912.
APA	Zhang JC,Shao, Jianbo,Luo HB,Liang, Rongguang,&Tian, Xiaobo.(2019).Phase unwrapping in optical metrology via denoised and convolutional segmentation networks.OPTICS EXPRESS,27(10),14903-14912.
MLA	Zhang JC,et al."Phase unwrapping in optical metrology via denoised and convolutional segmentation networks".OPTICS EXPRESS 27.10(2019):14903-14912.