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Substrate temperature dependence of znte epilayers grown on gaas(001) by molecular beam epitaxy
Zhao, Jie1,2; Zeng, Yiping1,2; Liu, Chao1,2; Li, Yanbo1,2
刊名Journal of crystal growth
2010-04-15
卷号312期号:9页码:1491-1495
关键词Reflection high-energy electron diffraction Atomic force microscopy Molecular beam epitaxy Zinc compounds Semiconducting ii-vi materials
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2010.01.032
通讯作者Zhao, jie(jiezhao_sub@163.com)
英文摘要Znte thin films have been grown on gaas(0 0 1) substrates at different temperatures with constant zn and te beam equivalent pressures (beps) by molecular beam epitaxy (mbe). in situ reflection high-energy electron diffraction (rheed) observation indicates that two-dimensional (2d) growth mode can be established after around one-minute three-dimensional (3d) nucleation by increasing the substrate temperature to 340 degrees c. we found that zn desorption from the znte surface is much greater than that of te at higher temperatures, and estimated the zn sticking coefficient by the evolution of growth rate. the zn sticking coefficient decreases from 0.93 to 0.58 as the temperature is elevated from 320 to 400 degrees c. the znte epilayer grown at 360 degrees c displays the narrowest full-width at half-maximum (fwhm) of 660 arcsec from (0 0 4) reflection in double-crystal x-ray rocking curve (dcxrc) measurements. the surface morphology of znte epilayers is strongly dependent on the substrate temperature, and the root-mean-square (rms) roughness diminishes drastically with the increase in temperature. (c) 2010 elsevier b.v. all rights reserved.
WOS关键词VAPOR-PHASE EPITAXY ; OPTICAL-PROPERTIES ; ZNSE ; MORPHOLOGY ; LAYERS ; FILMS ; GAAS
WOS研究方向Crystallography ; Materials Science ; Physics
WOS类目Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000277530200004
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2427865
专题半导体研究所
通讯作者Zhao, Jie
作者单位1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
2.Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Zhao, Jie,Zeng, Yiping,Liu, Chao,et al. Substrate temperature dependence of znte epilayers grown on gaas(001) by molecular beam epitaxy[J]. Journal of crystal growth,2010,312(9):1491-1495.
APA Zhao, Jie,Zeng, Yiping,Liu, Chao,&Li, Yanbo.(2010).Substrate temperature dependence of znte epilayers grown on gaas(001) by molecular beam epitaxy.Journal of crystal growth,312(9),1491-1495.
MLA Zhao, Jie,et al."Substrate temperature dependence of znte epilayers grown on gaas(001) by molecular beam epitaxy".Journal of crystal growth 312.9(2010):1491-1495.
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