| Phase transition of vanadium oxide films annealed with different methods | |
| Liang Ji-Ran1,2; Hu Ming1; Wang Xiao-Dong2; Kan Qiang2; Li Gui-Ke2; Chen Hong-Da2 | |
| 刊名 | Journal of infrared and millimeter waves
 |
| 2010-12-01 | |
| 卷号 | 29期号:6页码:457-460 |
| 关键词 | Vanadium dioxide thin film Infrared transmission spectrum Rapid elevating temperatue |
| ISSN号 | 1001-9014 |
| 通讯作者 | Liang ji-ran(liang_jiran@tju.edu.cn) |
| 英文摘要 | Vanadium oxide thin films were deposited by dual ion beam sputtering, and then annealled with different procedures of temperature elevating. optical transmission properties were measured at different temperature by use of fourier transform infrared spectrum, from which the relationship of transmission and temperature at a fixed wavelength of 5 mu m was obtained. the results show that the vanadium oxide thin film annealed with rapid elevating temperature has smaller and uniform crystal size, while the film annealed with normal elevating temperature has larger and wider distributed crystal size. all the films after annealing have abrupt change over 60% in transmission in infrared band. the phase transition temperature of vanadium oxide thin film after rapid elevating temperature annealing is 63.74 degrees c, which is higher than that of vanadium oxide thin film after normal elevating temperature annealing, 60.31 degrees c. the temperature range of phase transition of the former is also broader. |
| WOS关键词 | THIN-FILMS ; VO2 FILMS ; TEMPERATURE ; FABRICATION |
| WOS研究方向 | Optics |
| WOS类目 | Optics |
| 语种 | 英语 |
| 出版者 | SCIENCE CHINA PRESS |
| WOS记录号 | WOS:000285662200014 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2427824 |
| 专题 | 半导体研究所 |
| 通讯作者 | Liang Ji-Ran |
| 作者单位 | 1.Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China 2.Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China |
| 推荐引用方式 GB/T 7714 | Liang Ji-Ran,Hu Ming,Wang Xiao-Dong,et al. Phase transition of vanadium oxide films annealed with different methods[J]. Journal of infrared and millimeter waves,2010,29(6):457-460. |
| APA | Liang Ji-Ran,Hu Ming,Wang Xiao-Dong,Kan Qiang,Li Gui-Ke,&Chen Hong-Da.(2010).Phase transition of vanadium oxide films annealed with different methods.Journal of infrared and millimeter waves,29(6),457-460. |
| MLA | Liang Ji-Ran,et al."Phase transition of vanadium oxide films annealed with different methods".Journal of infrared and millimeter waves 29.6(2010):457-460. |
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