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1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects
Xue, Chunlai; Xue, Haiyun; Cheng, Buwen; Hu, Weixuan; Yu, Yude; Wang, Qiming
刊名Journal of lightwave technology
2009-12-15
卷号27期号:24页码:5687-5689
关键词Integrated optoelectronics Optical communication Optical interconnections Optoelectronic devices Photodetector arrays
ISSN号0733-8724
DOI10.1109/jlt.2009.2035090
通讯作者Xue, chunlai(clxue@semi.ac.cn)
英文摘要High-quality ge film was epitaxially grown on silicon on insulator using the ultrahigh vacuum chemical vapor deposition. in this paper, we demonstrated that the efficient 1 4 germanium-on-silicon p-i-n photodetector arrays with 1.0 mu m ge film had a responsivity as high as 0.65 a/w at 1.31 mu m and 0.32 a/w at 1.55 mu m, respectively. the dark current density was about 0.75 ma/cm(2) at 0 v and 13.9 ma/cm(2) at 1.0 v reverse bias. the detectors with a diameter of 25 mu m were measured at 1550 nm incident light under 0 v bias, and the result showed that the 3-db bandwidth is 2.48 ghz. at a reverse bias of 3 v, the bandwidth is about 13.3 ghz. the four devices showed a good consistency.
WOS关键词PERFORMANCE
WOS研究方向Engineering ; Optics ; Telecommunications
WOS类目Engineering, Electrical & Electronic ; Optics ; Telecommunications
语种英语
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号WOS:000272316900001
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2427593
专题半导体研究所
通讯作者Xue, Chunlai
作者单位Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
推荐引用方式
GB/T 7714
Xue, Chunlai,Xue, Haiyun,Cheng, Buwen,et al. 1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects[J]. Journal of lightwave technology,2009,27(24):5687-5689.
APA Xue, Chunlai,Xue, Haiyun,Cheng, Buwen,Hu, Weixuan,Yu, Yude,&Wang, Qiming.(2009).1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects.Journal of lightwave technology,27(24),5687-5689.
MLA Xue, Chunlai,et al."1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects".Journal of lightwave technology 27.24(2009):5687-5689.
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