1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects | |
Xue, Chunlai; Xue, Haiyun; Cheng, Buwen; Hu, Weixuan; Yu, Yude; Wang, Qiming | |
刊名 | Journal of lightwave technology
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2009-12-15 | |
卷号 | 27期号:24页码:5687-5689 |
关键词 | Integrated optoelectronics Optical communication Optical interconnections Optoelectronic devices Photodetector arrays |
ISSN号 | 0733-8724 |
DOI | 10.1109/jlt.2009.2035090 |
通讯作者 | Xue, chunlai(clxue@semi.ac.cn) |
英文摘要 | High-quality ge film was epitaxially grown on silicon on insulator using the ultrahigh vacuum chemical vapor deposition. in this paper, we demonstrated that the efficient 1 4 germanium-on-silicon p-i-n photodetector arrays with 1.0 mu m ge film had a responsivity as high as 0.65 a/w at 1.31 mu m and 0.32 a/w at 1.55 mu m, respectively. the dark current density was about 0.75 ma/cm(2) at 0 v and 13.9 ma/cm(2) at 1.0 v reverse bias. the detectors with a diameter of 25 mu m were measured at 1550 nm incident light under 0 v bias, and the result showed that the 3-db bandwidth is 2.48 ghz. at a reverse bias of 3 v, the bandwidth is about 13.3 ghz. the four devices showed a good consistency. |
WOS关键词 | PERFORMANCE |
WOS研究方向 | Engineering ; Optics ; Telecommunications |
WOS类目 | Engineering, Electrical & Electronic ; Optics ; Telecommunications |
语种 | 英语 |
出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
WOS记录号 | WOS:000272316900001 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2427593 |
专题 | 半导体研究所 |
通讯作者 | Xue, Chunlai |
作者单位 | Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China |
推荐引用方式 GB/T 7714 | Xue, Chunlai,Xue, Haiyun,Cheng, Buwen,et al. 1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects[J]. Journal of lightwave technology,2009,27(24):5687-5689. |
APA | Xue, Chunlai,Xue, Haiyun,Cheng, Buwen,Hu, Weixuan,Yu, Yude,&Wang, Qiming.(2009).1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects.Journal of lightwave technology,27(24),5687-5689. |
MLA | Xue, Chunlai,et al."1 x 4 ge-on-soi pin photodetector array for parallel optical interconnects".Journal of lightwave technology 27.24(2009):5687-5689. |
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