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Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere
Zhu, B. L.; Zhao, X. Z.; Su, F. H.; Li, G. H.; Wu, X. G.; Wu, J.; Wu, R.; Liu, J.
刊名Physica b-condensed matter
2007-06-15
卷号396期号:1-2页码:95-101
关键词Zno Pulsed-laser deposition (pld) Optical properties Deposition process
ISSN号0921-4526
DOI10.1016/j.physb.2007.03.018
通讯作者Zhu, b. l.(zhubailin97@hotmail.com)
英文摘要C-axis-orientated zno thin films were prepared on glass substrates by pulsed-laser deposition (pld) technique in an oxygen-reactive atmosphere, using a metallic zn target. the effects of growth condition such as laser energy and substrate temperature on the structural and optical properties of zno films had been investigated by x-ray diffraction (xrd), scanning electron microscopy (sem), transmission spectra and room-temperature (rt) photoluminescence (pl) measurements. the results showed that the thickness, crystallite size, and compactness of zno films increased with the laser energy and substrate temperature. both the absorption edges and the uv emission peaks of the films exhibited redshift, and uv emission intensity gradually increased as the laser energy and substrate temperature increased. from these results, it was concluded that crystalline quality of zno films was improved with increasing laser energy and substrate temperature. (c) 2007 elsevier b.n. all rights reserved.
WOS关键词AMORPHOUS OXIDE SEMICONDUCTORS ; WAVE-GUIDING FILMS ; PHOTOLUMINESCENCE PROPERTIES ; REACTIVE ABLATION ; DEPOSITION ; TEMPERATURE ; THICKNESS ; SI(111) ; PLD ; FABRICATION
WOS研究方向Physics
WOS类目Physics, Condensed Matter
语种英语
出版者ELSEVIER SCIENCE BV
WOS记录号WOS:000247506500017
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2426978
专题半导体研究所
通讯作者Zhu, B. L.
作者单位1.Wuhan Univ Sci & Technol, Key Lab Hubei Prov Ceram & Refractories, Wuhan 430081, Peoples R China
2.Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China
3.Chinese Acad Sci, Inst Semicond, Natl Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
4.Wuhan Univ Sci & Technol, Nanomat Ctr, Wuhan 430081, Peoples R China
推荐引用方式
GB/T 7714
Zhu, B. L.,Zhao, X. Z.,Su, F. H.,et al. Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere[J]. Physica b-condensed matter,2007,396(1-2):95-101.
APA Zhu, B. L..,Zhao, X. Z..,Su, F. H..,Li, G. H..,Wu, X. G..,...&Liu, J..(2007).Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere.Physica b-condensed matter,396(1-2),95-101.
MLA Zhu, B. L.,et al."Structural and optical properties of zno thin films on glass substrate grown by laser-ablating zn target in oxygen atmosphere".Physica b-condensed matter 396.1-2(2007):95-101.
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