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	Fabrication of zno films by radio frequency magnetron sputtering and annealing
	Gao, HY; Zhuang, HZ; Xue, CS; Wang, SY; Dong, ZH; He, JT
刊名	Rare metals
	2005-09-01
卷号	24期号:3页码:267-271
关键词	Zno films Radio frequency magnetron sputtering Annealing Ammonia ambience Buffer layers
ISSN号	1001-0521
通讯作者	Zhuang, hz()
英文摘要	Zno thin films were deposited on si(111) substrates through a radio frequency (rf) magnetron sputtering system. then the samples were annealed at different temperatures in air ambience and ammonia ambience respectively. the structure and composition of the zno films were studied by x-ray diffraction (xrd) and x-ray photoelectron spectroscopy (xps). the morphology of the samples was studied by scanning electron microscopy (sem). measured results show that zno films with hexagonal wurtzite structure were grown on si(111) substrates when annealed in the two ambiences. the volatilization process of zno in the ammonia ambience at high temperature was discussed and the mechanism of the reaction was analyzed.
WOS关键词	PULSED-LASER DEPOSITION ; ZINC-OXIDE FILMS ; THIN-FILMS ; OPTICAL-PROPERTIES ; SAPPHIRE ; GROWTH ; TEMPERATURE
WOS研究方向	Materials Science ; Metallurgy & Metallurgical Engineering
WOS类目	Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
语种	英语
出版者	NONFERROUS METALS SOCIETY CHINA
WOS记录号	WOS:000232447600013
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426538
专题	半导体研究所
通讯作者	Zhuang, HZ
作者单位	Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
推荐引用方式 GB/T 7714	Gao, HY,Zhuang, HZ,Xue, CS,et al. Fabrication of zno films by radio frequency magnetron sputtering and annealing[J]. Rare metals,2005,24(3):267-271.
APA	Gao, HY,Zhuang, HZ,Xue, CS,Wang, SY,Dong, ZH,&He, JT.(2005).Fabrication of zno films by radio frequency magnetron sputtering and annealing.Rare metals,24(3),267-271.
MLA	Gao, HY,et al."Fabrication of zno films by radio frequency magnetron sputtering and annealing".Rare metals 24.3(2005):267-271.

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