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Nanocavity shrinkage and preferential amorphization during irradiation in silicon
Zhu, XF; Wang, ZG
刊名Chinese physics letters
2005-03-01
卷号22期号:3页码:657-660
ISSN号0256-307X
通讯作者Zhu, xf(xianfangzhu@hotmail.com)
英文摘要We model the recent experimental results and demonstrate that the internal shrinkage of nanocavities in silicon is intrinsically associated with preferential amorphization as induced by self-ion irradiation. the results reveal novel thermodynamic nonequilibrium properties of such an open-volume nanostructure in condensed matter and also of covalently bound amorphous materials both at nanosize scale and during ultrafast interaction with energetic beam.
WOS关键词AMORPHOUS-SILICON ; ION IRRADIATION ; INSTABILITY ; FLOW ; SI
WOS研究方向Physics
WOS类目Physics, Multidisciplinary
语种英语
出版者CHINESE PHYSICAL SOC
WOS记录号WOS:000227711200038
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2426443
专题半导体研究所
通讯作者Zhu, XF
作者单位1.Xiamen Univ, Dept Phys, Lab Low Dimens Nanostruct, Xiamen 361005, Peoples R China
2.Xiamen Univ, Nanomat Ctr, Lab Low Dimens Nanostruct, Xiamen 361005, Peoples R China
3.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
4.Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
推荐引用方式
GB/T 7714
Zhu, XF,Wang, ZG. Nanocavity shrinkage and preferential amorphization during irradiation in silicon[J]. Chinese physics letters,2005,22(3):657-660.
APA Zhu, XF,&Wang, ZG.(2005).Nanocavity shrinkage and preferential amorphization during irradiation in silicon.Chinese physics letters,22(3),657-660.
MLA Zhu, XF,et al."Nanocavity shrinkage and preferential amorphization during irradiation in silicon".Chinese physics letters 22.3(2005):657-660.
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