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	Fabrication of gan films through reactive reconstruction of magnetron sputtered zno/ga2o3
	Gao, HY; Zhuang, HZ; Xue, CS; Dong, ZH; He, JT; Liu, YA; Wu, YX; Tian, DH
刊名	Journal of central south university of technology
	2005-02-01
卷号	12期号:1页码:9-12
关键词	Fabrication Ga2o3 film Zno buffer layer Radio frequency magnetron sputtering Nitriding
ISSN号	1005-9784
通讯作者	Zhuang, hz()
英文摘要	A simple and easily operated technique was developed to fabricate gan films. gan films possessing hexagonal wurtzite structure were fabricated on si(111) substrates with zno buffer layers through nitriding ga2o3 films in the tube quartz furnace. zno buffer layers and ga2o3 films were deposited on si substrates in turn by using radio frequncy magnetron sputtering system before the nitriding process. the structure and composition of gan films were studied by x-ray diffraction 1 selected area electron diffraction and fourier transform infrared spectrophotometer. the morphologies of gan films were studied by scanning electron microscopy. the results show that zno buffer layer improves the crystalline quality and the surface morphology of the films relative to the films grown directly on silicon substrates. the measurement result of room-temperature photoluminescence spectrum indicates that the photoluminescence peaks locate at 365 nm and 422 nm.
WOS关键词	MOLECULAR-BEAM EPITAXY ; OPTICAL-PROPERTIES ; CUBIC GAN ; GROWTH ; MICROSTRUCTURE ; SUBSTRATE ; SAPPHIRE ; SI(001)
WOS研究方向	Metallurgy & Metallurgical Engineering
WOS类目	Metallurgy & Metallurgical Engineering
语种	英语
出版者	JOURNAL OF CENTRAL SOUTH UNIV TECHNOLOGY
WOS记录号	WOS:000227564800003
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426377
专题	半导体研究所
通讯作者	Zhuang, HZ
作者单位	Shandong Normal Univ, Inst Semicond, Jinan 250014, Peoples R China
推荐引用方式 GB/T 7714	Gao, HY,Zhuang, HZ,Xue, CS,et al. Fabrication of gan films through reactive reconstruction of magnetron sputtered zno/ga2o3[J]. Journal of central south university of technology,2005,12(1):9-12.
APA	Gao, HY.,Zhuang, HZ.,Xue, CS.,Dong, ZH.,He, JT.,...&Tian, DH.(2005).Fabrication of gan films through reactive reconstruction of magnetron sputtered zno/ga2o3.Journal of central south university of technology,12(1),9-12.
MLA	Gao, HY,et al."Fabrication of gan films through reactive reconstruction of magnetron sputtered zno/ga2o3".Journal of central south university of technology 12.1(2005):9-12.

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