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	Magnetron sputtering growth of inas0.3sb0.7 films on (100) gaas substrates: strong effect of growth conditions on film structure
	Peng, CT; Chen, NF; Wu, JL; Yin, ZG; Yu, Y
刊名	Journal of crystal growth
	2005-12-15
卷号	285期号:4页码:459-465
关键词	Crystal structure Magnetron sputtering Semiconducting iii-v materials
ISSN号	0022-0248
DOI	10.1016/j.jcrysgro.2005.08.043
通讯作者	Peng, ct(ctpeng@red.semi.ac.cn)
英文摘要	The growth of highly lattice-mismatched inas0.3sb0.7 films on (100) gaas substrates by magnetron sputtering has been investigated and even epitaxial lnas(0.3)sb(0.7) films have been successfully obtained. a strong effect of the growth conditions on the film structure was observed, revealing that there was a growth mechanism transition from three-dimensional nucleation growth to epitaxial layer-by-layer growth mode when increasing the substrate temperature. a qualitative explanation for that transition was proposed and the critical conditions for the epitaxial layer-by-layer growth mode were also discussed. (c) 2005 elsevier b.v. all rights reserved.
WOS关键词	MOLECULAR-BEAM EPITAXY ; CHEMICAL-VAPOR-DEPOSITION ; INAS1-XSBX ; ALLOYS ; INASSB ; INSB
WOS研究方向	Crystallography ; Materials Science ; Physics
WOS类目	Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000234164600003
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2426353
专题	半导体研究所
通讯作者	Peng, CT
作者单位	1.Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China 2.Chinese Acad Sci, Inst Mech, Natl Lab Micro Gravity, Beijing 100080, Peoples R China
推荐引用方式 GB/T 7714	Peng, CT,Chen, NF,Wu, JL,et al. Magnetron sputtering growth of inas0.3sb0.7 films on (100) gaas substrates: strong effect of growth conditions on film structure[J]. Journal of crystal growth,2005,285(4):459-465.
APA	Peng, CT,Chen, NF,Wu, JL,Yin, ZG,&Yu, Y.(2005).Magnetron sputtering growth of inas0.3sb0.7 films on (100) gaas substrates: strong effect of growth conditions on film structure.Journal of crystal growth,285(4),459-465.
MLA	Peng, CT,et al."Magnetron sputtering growth of inas0.3sb0.7 films on (100) gaas substrates: strong effect of growth conditions on film structure".Journal of crystal growth 285.4(2005):459-465.

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